Fast Parameters Extraction of General Three - DimensionInterconnects Using Geometry Independent Measured Equation ofInvarianceWeikai

Measured Equation of Invariance(MEI) is a new concept in computational electromagnetics. It has been demonstrated that the MEI technique can be used to terminate the meshes very close to the object boundary and still strictly preserves the sparsity of the FD equations. Therefore, the nal system matrix encountered by MEI is a sparse matrix with size similar to that of integral equation methods. However , complicated Green's function and disagreeable Som-merfeld integrals make the traditional MEI very diicult, if not impossible, to be applied to analyze multilayer and multiconductor interconnects. In this paper, we propose the Geometry Independent MEI(GIMEI) which substantially improved the original MEI method. We use GIMEI for capacitance extraction of general three-dimension VLSI interconnect. Numerical results are in good agreement with published data and those obtained by using FASTCAP 1], while GIMEI is generally an order of magnitude faster than FASTCAP and uses signiicant less memory than FAST-CAP.